Basic Priciples Scanning White-Light Interferometry-扫描白光干涉测量的基本原理

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• _Tau:地形测量基于a the topography measurement is based on a 技术称为白光 technique called white light 干涉测量Polytech扫描白色 interferometry Polytech scanning white 光干涉仪是一种特殊类型 light interferometer is a special type 迈克尔逊干涉仪的扫描 of Michelson interferometer that scans the surface height of the test object to achieve this a beam splitter divides the 来自白光源的光束 beam coming from a white light source 分为两部分 into two parts 参考光束从a反射 the reference beam is reflected from a 测量时参考平面 reference plane while the measurement 是在测试对象上的事件 being is incident on the test object 当改变之间的距离 when changing the distance between the 样品和光学干涉仪 sample and the interferometer optical 干扰发生在每一点 interference occurs at every point of 光路所在的表面 the surface where the optical path 长度完全相同 length is exactly the same for the 参考和测量光束 reference and the measurement beam 在垂直扫描期间 during the vertical scan the 干扰模式被捕获 interference patterns are captured by 软件时的摄像机 the video camera while the software 从这些数据计算地形 computes the topography from this data
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